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FlexTRAK-BH Plasma Treatment System


The FlexTRAK-BH system is designed for high-throughput
processing of microelectronic boats, trays, or other flat
device carriers, up to 2 boats per plasma cycle. The patented
plasma chamber design provides exceptional uniformity and
process repeatability. Its three axis symmetrical chamber
ensures all areas of the product are treated uniformly, while
tight control over all process parameters ensures highly
repeatable results.

The universal architecture of the FlexTRAK-BH system
accommodates a wide range of boat sizes in the same
system, yielding unmatched production flexibility. Its small chamber volume and proprietary process control system provide short cycle times, with high machine autonomy.

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