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Ap1000 Plasma System




Features

March Plasma System’s AP-1000 plasma system is designed
to meet the rigorous demands of 24-hour operation. The
system delivers uniform plasma treatment with unmatched
reliability, safety and ease of operation.

The AP-1000 platform is completely self-contained, requiring
minimal floor space. The pump, chamber, control electronics,
and 13.56 MHz power supply are housed in a single enclosure. Full front access allows for convenient access to all interior components. The pump is positioned on rollers for easy removal.

The plasma chamber is constructed of 11-gauge stainless steel with aluminum fixtures for superior durability. The chamber has multiple removable and adjustable shelves to accommodate a range of part carriers including magazines, trays, wafer and Auer boats.

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